Layer-engineered inorganic-organic hybrid materials by ALD/MLD.
29th June 2017, INTERDISCIPLINARY LECTURE SERIES, Ruhr-Universität Bochum, HNC 30
Start: 29th June 2017 05:00 p.m.
End: 29th June 2017 06:00 p.m.
Maarit Karppinen, Aalto University, Finland
Anjana Devi, Ruhr-Universität Bochum
Inorganic-organic hybrid materials have the capacity– once carefully designed and
fabricated – to exhibit tailored combinations of properties traditionally seen for inorganics or
organics separately, and even beyond. An elegant, yet industrially feasible way to realize this is to
combine the state-of-the-art gas-phase thin-film deposition technique of inorganics, i.e. ALD
(Atomic Layer Deposition), with the emerging MLD (Molecular Layer Deposition) technique for
organics. The combined ALD/MLD technique enables the atomic/molecular layer-by-layer
fabrication of inorganic-organic hybrid thin films through sequential self-limiting gas-surface
reactions with high precision for the individual-layer and overall-film thicknesses and compositions.
In this talk I will discuss our recent successes in synthesizing such fundamentally new types of
layer-engineered hybrid materials within my ERC Advanced Grant Project.
We now have ALD/MLD processes for a rich variety of hybrid materials with different inorganic (Al,
Zn, Ti, Mn, Fe, Co, Cu, Li, Na, K, Mg, Ca, Sr, Ba, Eu, Er, etc.) and organic (allyl, aryl, pyridine,
nucleobase, etc.) constituents. In particular, we have employed the ALD/MLD technique to fabricate
textile-integrated oxide-organic thin-film superlattice thermoelectrics in which the periodically
introduced ultrathin organic layers between oxide layers hinder phonon transport,1-3 and
demonstrated the first flexible and transparent Li-ion/organic microbattery.4,5 Also discussed are
the new directions foreseen for the ALD/MLD technique related to metal organic framework (MOF)
and guest-accessible coordination-framework materials,6-9 and new exciting luminescence