ForMikro FlexTMDSense - Research into novel, flexible sensor systems based on two-dimensional material systems

Type of Funding: Federal and State Funding, BMBF


In the BMBF-funded ForMikro project FlexTMDSense - "Research into novel, flexible sensor systems based on two-dimensional material systems"ultra-thin pH and gas sensor systems based on two-dimensional (2D) semiconductor films made from the transition metal dichalcogenide material class are being researched. The 2D electronics/sensors are transparent, flexible and biocompatible. Yet the technology for this cutting-edge field of microelectronics - based on 2D materials - does not yet have the maturity necessary for industrial mass applications. In the FlexTMDSense project, an innovative, monolayer accurate deposition and ablation technology at low temperatures for the fabrication of low-cost, flexible, ultrasensitive, electronic gas and pH sensors will be elaborated and subsequently fabricated on an industrial scale in an 8-inch cluster facility. Novel precursors are synthesized and large area films are grown with monolayer precision using atomic layer deposition (ALD). The low process temperatures enable a scalable bottom-up approach on flexible substrates while maintaining a high surface-to-volume ratio. The lightweight and flexible design of the sensors makes them particularly suitable for use in the healthcare sector and for smart packaging. Due to the low-cost and resource-saving approach, a high broad efficacy in a wide variety of application areas, e.g. health monitoring or wearables, can be expected.

Project Website

Contact Person at UA Ruhr:
Dr.-Ing. Claudia Bock, Ruhr-Universität Bochum

UA Ruhr Researchers:
Prof. Dr.-Ing. Peter Awakowicz, Ruhr-Universität Bochum
Prof. Dr. Anjana Devi, Ruhr-Universität Bochum
Prof. Dr.-Ing. Andreas Ostendorf, Ruhr-Universität Bochum

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