Prof. Dr.-Ing. Peter Awakowicz
Electrical Engineering and Plasma Technology
Ruhr-Universität Bochum
Contact
- awakowicz[at]aept[dot]rub[dot]de
- +49 234 32 22487
- personal website
Author IDs
- ORCID: 0000-0002-8630-9900
- Google Scholar: MPKunGAAAAAJ&hl=de
Hub
coatings
plasma applications
plasma diagnostics
plasma enhanced chemical vapor deposition
plasma sources
plasmas
spectroscopy
sputtering